
Rohde & Schwarz ZNA67 4-port
The ZNA67 is a high-end vector network analyzer (VNA) designed for precision RF and microwave measurements, with a frequency range extending from 10 MHz to 67 GHz. It is part of the ZNA series, which is engineered for demanding applications in research, development, and high-frequency component characterization.
Key Features and Capabilities:
- Frequency Coverage:
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- Operates from 10 MHz to 67 GHz, covering a broad range of applications, including 5G, radar, satellite communications, and mmWave device testing.
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- High Dynamic Range & Low Trace Noise:
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- Dynamic range of up to 140 dB, crucial for accurately measuring high-rejection filters and amplifiers.
- Low trace noise (< 0.001 dB RMS) ensures highly precise S-parameter measurements.
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- Multiple-Port Configurations:
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- Available in 2- and 4-port models, allowing for single-ended and differential measurements.
- Integrated switching and calibration units reduce the need for external accessories.
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- High-Speed, Wideband Measurements:
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- Wide IF bandwidths (up to 30 MHz) enable fast measurements, suitable for on-wafer, S-parameter, and time-domain analysis.
- Supports modulation and spectrum analysis for advanced signal characterization.
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- Direct Receiver Access & High Output Power:
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- Allows for nonlinear device testing, load-pull, and active device characterization.
- High output power enhances measurement capabilities for high-power and passive components.
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- Advanced Calibration & De-embedding Features:
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- Built-in automatic calibration simplifies on-wafer, fixture, and DUT characterization.
- De-embedding tools for precise fixture and PCB trace modeling.
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- Modern User Interface & Automation:
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- Intuitive multi-touch GUI with customizable views.
- Full Python, MATLAB, and SCPI programming support for automated measurements.
- Seamless integration with simulation and modeling tools.
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Scientific & Engineering Applications:
- Millimeter-Wave Research:
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- Characterizing 5G NR, Wi-Fi 6E/7, and satellite communication components.
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- High-Frequency Semiconductor Testing:
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- On-wafer measurements of MMICs, LNAs, and power amplifiers.
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- Quantum Computing & Cryogenic Applications:
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- Evaluating superconducting qubits, microwave resonators, and cryo-RF components.
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- Antenna and Radar System Development:
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- Measuring S-parameters, gain, and phase for antennas and phased arrays.
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- Material Characterization:
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- Permittivity and permeability testing of RF substrates and composites.
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For more information:
- Ask Dr. Nagle
- Download the manual
- Go to the manufacturer site

Installed Hardware Options:
- ZNA-B26 – Direct IF access
- ZNA-B5 – 2nd internal LO source (supports cross-frequency applications)
- ZNA-B91 – Additional trigger/control I/O (3 trigger in, 4 out, pulse modulator control, noise source control, RF off input)
- ZNA67-B16 – Direct source/receiver access (4 ports)
- ZNA67-B163 – Direct source monitor access for Ports 1 & 3 (requires -B16, -B23, -B21)
- ZNA67-B21 to B24 – Step attenuators for all four ports (mechanical, 50–70 dB range)
- ZNA67-B213 – Internal combiner for Ports 1 & 3 (two-tone generation)
- ZNA67-B3 – 3rd and 4th internal source
- ZNA67-B302 – Low-noise preamp at receiver Port 2 (export restricted)
- ZNA67-B31 to B34 – Receiver step attenuators for all four ports (35 dB in 5 dB steps)
- ZNA67-B41, B43 – Internal pulse modulators for Ports 1 and 3
- ZNA67-B501 – Spur magnitude reduction at Port 1 for enhanced spectral purity (export restricted)
Included Peripherals Summary
- ZV-Z196 RF Cable (Part No. 1306.4559.36)
– 1.85 mm(f) to 1.85 mm(m), DC to 67 GHz, 36″, flexible and phase-stable - ZN-Z218 Calibration Kit (Part No. 1337.3502.02)
– Includes: open, short, match (male/female), f–f, m–f, m–m adapters, torque and break-over wrenches, USB stick, calibration certificate - ZN-Z156 Calibration Unit (Part No. 1332.7239.03)
– 2 ports, 50 Ω, 10 MHz to 67 GHz, 1.85 mm(f) - NRP67S Power Sensor (Part No. 1424.6396.02)
– 50 MHz to 67 GHz, 100 pW to 100 mW
– 3-path diode sensor, 1.85 mm(m) connector