Micro-Electro-Mechanical Systems (MEMS) sensors are typically fabricated on 8-inch or even bigger silicon wafers using micro manufacturing techniques. After wafer fabrication, all the devices in the wafer (from a few to above ten thousand in quantity) need to be tested and then diced to single dies for further packaging and assembly to a product. Performing a comprehensive test of the wafer before dicing is the common practice since wafer-level testing can be done efficiently using an automated probe station. Conventional wafer dicing such as blade dicing cuts the entire wafer to thousands of single dies on a dicing tape, which makes wafer handling and testing much more difficult afterwards. This poses a unique challenge during the early R&D phases when the device yield is relatively low and board/system development based on single dies needs to go in parallel with wafer-level probing. Zepsor addresses this challenge with selective laser dicing that allows the team to keep the integrity of the wafer while taking out a small portion of the dies for further development. This presentation will show the background of the zero-power sensor technology as well as technical hurdles the team overcome during the development of the laser dicing recipe in T.J. Rodgers RLE Laboratory at MIT. More specifically, the team will dive deep into the data-driven optimization process of trace width, laser drift control, and cutting speed.
The Rodgers RLE Forum is a time to appreciate and learn from examples of impactful engineering. The laboratory hosts these opportunities for engagement in support of its mission to serve as a cutting-edge hub for advancing and sharing knowledge and best practices in high-performance prototyping.
About the presenters:
Mr. Kritank Kalyan is a MEMS and nanotechnology engineer with deep expertise in microfabrication, thin-film deposition, and microfluidic system integration. He holds a Master of Science in Engineering (Nanotechnology) from the University of Pennsylvania and a Bachelor of Technology in Mechanical Engineering. Kritank currently works as a Senior MEMS Engineer at Zepsor Technologies, where he is contributing to device design, fabrication, and characterization for the next-generation zero-power IR MEMS sensor technology. His prior research spans AlScN thin films, magneto strictive materials, PMUT–microfluidic integration, and high-speed droplet impact dynamics on engineered surfaces. Across his past roles at the University of Pennsylvania and the Indian Institute of Science, he has developed advanced microcantilevers, tunable PMUT devices, superhydrophobic and slippery surface platforms, and novel
Dr. Zhenyun Qian is a co-founder and the CTO of Zepsor Technologies. Dr. Qian received his B.S. degree in Electronic Science and Engineering from Southeast University, Nanjing, China, the M.S. and Ph.D. degree in Electrical and Computer Engineering from Northeastern University, Boston, MA. He also holds a part-time faculty position in the department of Electrical and Computer Engineering at Northeastern University. He has technical expertise in MEMS/NEMS, physical/chemical sensors, wireless sensor systems and semiconductor manufacturing. He has published more than 90 papers in high-impact journals and at premier conferences and holds more than 10 device patents in the field of MEMS/NEMS. He was the PI/Co-PI of over $10M government research grants. He is one of the inventors of zero-power IR sensors and made critical contributions to the design and development of the first prototypes of the sensor. He thereafter led the efforts on the continuous development of the technology towards commercialization. Dr. Qian was selected as a DARPA Riser by the Defense Advanced Research Projects Agency in 2018 and received TechConnect Innovation Award in 2019. He also received several best paper awards in top MEMS conferences.
Zepsor Technologies is a deep-tech startup commercializing zero-power sensor technologies developed at Northeastern University. Zepsor is redefining the way humans interact with machines by delivering a zero power human–machine interface platform. Their patented micro and nano scale infrared (IR) sensors operate in an “off but alert” state: they consume virtually no energy until they detect a target event. This breakthrough enables a new generation of always ready interfaces for wearables (e.g., smart glasses), AR/VR devices, smart home and industrial automation, automotive interiors, security systems, and touch free public infrastructure.